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Application 1

Semiconductor

Application 1

Raised floor pedestals for front end wafer fabs

Quiet Island large vibration isolation platform
Quiet Island®
TMC’s Quiet Island® is an innovative solution that replaces a section of the raised floor area with a “Quiet Island” anchored to the sub-floor below. The Quiet Island consists of a special platform combined with a dedicated support structure, the nature of which depends upon the application.
STACIS active piezoelectric vibration cancellation system
STACIS® III
Employing advanced inertial vibration sensors, sophisticated control algorithms, and state-of-the-art piezoelectric actuators, STACIS cancels vibration in real time by continuously measuring floor activity, then expanding and contracting piezoelectric actuators to filter out floor motion.
Rigid-Damped Tripod
The Rigid-Damped Tripod is a low price solution for vibration sensitive tools that ar too massive to be placed on the raised floor.