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Application 2

Semiconductor

Application 2

Test and Failure analysis labs

SEM-Base VI photo
SEM-Base®
SEM-Base is an active vibration cancellation floor platform designed for use specifically with Scanning Electron Microscopes. Designed to support all commercial SEM or similar SEM-type instruments on any lab floor, SEM-Base is the ideal solution to bring your lab to within the microscope’s vibration criteria.
STACIS active piezoelectric vibration cancellation system
STACIS® III
Employing advanced inertial vibration sensors, sophisticated control algorithms, and state-of-the-art piezoelectric actuators, STACIS cancels vibration in real time by continuously measuring floor activity, then expanding and contracting piezoelectric actuators to filter out floor motion.
Floor platform with active piezoelectric vibration isolators
STACIS® Floor Platform
TMC’s 65 Series Floor Platforms combine our Stainless Steel Platforms with a unique “lifthood” design, our isolators “cradle” the platform allowing the tool to be lifted a minimal distance above the floor. The platform may be custom designed to match the tool footprint or any desired shape.
Mag-NetX magnetic field cancellation system
Mag-NetX®
Mag-NetX®, an innovative system providing active compensation of magnetic field fluctuations. Designed both for point-of-use and OEM applications, Mag-NetX® is ideal for scanning and transmission electron microscopes, electron beam lithography systems, ion beam instruments, and any tools that incorporate a charged beam. Combining Mag-NetX® with TMC’s advanced vibration isolation systems, we can provide the ultimate control of vibration and magnetic fields.