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Application 4

Semiconductor

Application 4

Internal isolators for inspection, lithography, and metrology tools (OEM).

Vibration cancellation for semiconductor moving stage tools
Stage-Base™
Stage-Base 450 is specifically designed to be the primary vibration cancellation system for advanced semiconductor tools which incorporate high-precision motorized X-Y stages. With the addition of VCM with feed-forward control for even faster settling time to further increase throughput, the result is the most advanced Active Vibration and Motion Cancellation system for moving stage applications.
MaxDamp®
MaxDamp® is a highly damped version of our Gimbal Piston™ Air Isolator. Ideal for OEM equipment with motorized X-Y stages or robots which require high performance vibration isolation and aggressive settling time for stage-induced motion of the isolated payload in a low cost, passive system.
ElectroDamp stage vibration cancellation
Electro-Damp® II
Electro-Damp® is designed specifically to increase throughput, resolution, and yield in semiconductor manufacturing applications. The Electro-Damp II adds modularity, digital control, feedforward, high-force/high-clearance actuators, and multiple digital user interfaces are specifically designed for use in OEM applications.
PEPS II pneumatic isolator controller
PEPS® II
PEPS® II is a digital non-contacting, height control system for TMC pneumatic vibration isolation systems. Applications range from semiconductor manufacturing equipment to improve settling time and increase yields, to precision laboratory environments which demand the optimum noise performance and platform stability.